适用于扇出型封装工艺的钛种子层蚀刻液
LtF E-53
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TOP ＞ LtF E-53
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Semiconductor
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Titanium
LtF E-53
Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
LtF E-53 是一种用于扇出型封装工艺的钛种子层蚀刻液。
◆特点
1. LtF E-53 是一种以过氧化氢为基础制成的钛种子层蚀刻液
2. 浸泡处理时的蚀刻速率为：25℃ 时约 30 nm/min，40℃ 时约 85 nm/min
3. 对钛具有高度选择性蚀刻，对铜、铝、锡及焊料等其他材料腐蚀性极低
4. 不含对环境有害的物质
◆特点
1. LtF E-53 是一种以过氧化氢为基础制成的钛种子层蚀刻液
2. 浸泡处理时的蚀刻速率为：25℃ 时约 30 nm/min，40℃ 时约 85 nm/min
3. 对钛具有高度选择性蚀刻，对铜、铝、锡及焊料等其他材料腐蚀性极低
4. 不含对环境有害的物质
RDL pattern after Ti etching (L/S=2/2 μm)
Selective etching of titanium achieves copper pattern formation with smooth and flat surface.
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Cross section of RDL after Ti etching
No undercut of copper pattern after Ti etching
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Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
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