适用于扇出型工艺的铜种子层蚀刻液

LtF E-52

Chemicals
Semiconductor
Stripping
Copper

LtF E-52

LtF E-52 is a copper seed etching solution for Fan-out process.

◆Features
1. Effectively preventing galvanic corrosion of copper fine pattern.
2. Weakly alkaline etching solution
3. SUS tank can be used because solution is halogen-free.
4. 2200 and 300 nm/min of etching rate through spray and immersion etching respectively.

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