适用于扇出型工艺的铜种子层蚀刻液
LtF E-51
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TOP ＞ LtF E-51
Chemicals
Semiconductor
Stripping
Copper
LtF E-51
Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
LtF E-51 是一种用于扇出型封装工艺的铜种子层蚀刻液。
◆特点
1. 无电镀铜层的蚀刻速度快于电镀铜层
2. 有效抑制侧蚀和图形宽度缩小
3. 处理后的铜表面光滑
4. 由于氧化剂不会自分解，稳定性优于硫酸-过氧化氢蚀刻体系
5. 浴液成分易于分析与控制
6. 在最佳操作条件下，喷淋蚀刻速率为 300 nm/min
◆特点
1. 无电镀铜层的蚀刻速度快于电镀铜层
2. 有效抑制侧蚀和图形宽度缩小
3. 处理后的铜表面光滑
4. 由于氧化剂不会自分解，稳定性优于硫酸-过氧化氢蚀刻体系
5. 浴液成分易于分析与控制
6. 在最佳操作条件下，喷淋蚀刻速率为 300 nm/min
Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
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