适用于晶圆工艺的钛蚀刻液
Melstrip TI-3991
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TOP ＞ Melstrip TI-3991
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Melstrip TI-3991
Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
Melstrip TI-3991 是一种用于晶圆上溅射钛膜的蚀刻液。
◆特点
1. Melstrip TI-3991 是一种以过氧化氢为基础的碱性钛蚀刻液
2. 浸泡处理时的蚀刻速率为 25℃ 时约 30 nm/min，40℃ 时约 85 nm/min
3. 对钛具有高度选择性蚀刻性能
4. 对铜、铝硅焊盘、焊球、二氧化硅、氮化硅及聚酰亚胺膜腐蚀性低
5. 不含环境有害物质
◆特点
1. Melstrip TI-3991 是一种以过氧化氢为基础的碱性钛蚀刻液
2. 浸泡处理时的蚀刻速率为 25℃ 时约 30 nm/min，40℃ 时约 85 nm/min
3. 对钛具有高度选择性蚀刻性能
4. 对铜、铝硅焊盘、焊球、二氧化硅、氮化硅及聚酰亚胺膜腐蚀性低
5. 不含环境有害物质
无氟
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Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
Lyog5aSW6YOo44K144Kk44OI6KGo56S655So44GuQ1NT44GM44GT44GT44Gr5YWl44KK44G+44GZ44CCICovDQoJLmhvZ2Ugew0KDQoJfQ==
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